Neutron Activation Analysis(NAA)
Neutron Activation Analysis
Identify and measure trace contaminants in bulk materials
Inorganic materials such as polysilicon. Organic polymers tissues and biological materials.
ppt to ppb
High Resolution Inductively Coupled Plasma Mass Spectroscopy (HR-ICPMS)
High Resolution Inductively Coupled Plasma Mass Spectrometer
Identify and measure trace metals in aqueous samples
VPD samples, ultra pure water, process chemicals, material extracts, chemical waste streams
ppt to ppb
Vapor Phase Decomposition (VPD)
Vapor Phase Decomposition
Collection process used to identify and measure trace metals on wafer surfaces.
Silicon wafers, hydrofluoric acid soluble thin films
E6 to E14 atoms/cm2
GeMeTec WSPS with PAD-Fume and PAD-Scan
Gemetec Wafer Surface Preparation System with Programmable Automated Decomposition Fumer and Programmable Automated Droplet Scanner
Automated VPD prep tool. Wafers are handled by robot in ULPA filtered class 10 environment and transferred from cassette stand to fuming module to scanning module.
Silicon wafers, hydrofluoric acid soluble thin films
E6 to E14 atoms/cm2
Inductively Coupled Plasma Optical Emission Spectroscopy (ICPOES)
Inductively Coupled Plasma Optical Emission Spectrometer
identify and measure trace metals in aqueous samples
water, chemicals, material extracts, slurries, chemical waste streams
ppb to ppm
Wavelength Dispersive X-Ray Fluorescence Spectroscopy (WDXRF)
Wavelength Dispersive X-Ray Fluorescence Spectrometer
qualitative and quantitative elemental analysis of solid materials
Identify unknowns, elemental bulk analysis, thin films composition, contaminant studies
ppm to wt%
Fourier Transform Infrared Spectroscopy (FTIR)
Micro Fourier Transform Infrared Spectrometer
identification of organic and inorganic compounds
Identify molecular composition of organic materials and polymers, characterize thin films, analyze non-reactive gases
wt%
Thermal Desorb Gas Chromatograph Mass Spectroscopy (ATD-GC-MS)
Thermal Desorb Gas Chromatograph Mass Spectrometer
qualitative and quantitative analysis of organic compounds and mixtures
solvents, air samples, process chemicals, water, polymers, wafers
ppb to wt%
Ion Chromatography (IC)
Ion Chromatography
Aqueous ionics measurements
anions and cations in UPW, diluted chemicals, material extracts
ppb to ppm
Total Organic Carbon (TOC)
Total Organic Carbon Analyzer
inorganic and organic carbon determinations in aqueous samples
water, water extracts
0.1 to 10ppm
Auto-Titrator
Potentiometry based autotitration systems